- Fully computerized operation
- Historical and real time graphical display
- Independent vacuum pumping systems on all ovens and antechambers
- Integrated moisture, oxygen, argon, and helium monitoring
- Configurable modular design
Miyachi Unitek's AX5000 Atmospheric Enclosure is a rugged, tight, Windows® controlled atmospheric enclosure. It provides a safe, easy-to-access, easy-to-use enclosure optimized for hermetic sealing applications as seen in electronic component packaging manufacturing.
Constructed of Type 304 internally polished stainless steel, the AX5000's sturdy tubular frame provides solid support for automation and motion requirements. The atmospheric enclosure features an easily-removed safety glass window equipped with glove ports that have built-in armrests and butyl gloves.
The AX5000 conforms to NASA-STD-3000 ergonomic standards, allowing comfortable use for a broad range of body types.
GLOVEBOX SPECIFICATIONS AND OPTIONS :
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Features
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Antechambers and Ovens |
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Configuration Options |
End, front, rear loading |
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Heating |
Wall heating or heated shelves |
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Temperature |
0-200° C std., higher available |
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Vacuum Pumps |
Rotary Vane, Dry, or Turbo Pumps |
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Analysis and Monitoring Capabilities |
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Oxygen Detection Range |
0-1000 PPM or % |
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Moisture Detection Range |
0-150 PPM or ° C dewpoint |
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Helium Monitoring |
% |
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Argon Monitoring |
% |
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Utilities |
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Electrical |
5-wire, 208VAC, 3-phase, 30 amps, 50/60 Hz OR |
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Inputs |
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Environmental gas |
60psi (415kPa) |
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Automatic Door gas |
80psi (550kPa) |
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Chilled Water Needed for oven flange cooling Not required with optional water re-circulator |
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Features
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Gas Purification |
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Single Column |
30 CFM (51 m3/hr) |
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Dual Column |
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Automatic Dual Column |
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Gas Mixers |
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Manual Set Mixers |
Two and three gas versions |
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Automatic Closed Loop Mixer |
Two gases |
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Others |
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Soot Removal Systems |
30 CFM (51 m3/hr) or 100 CFM (170 m3/hr) |
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CDRH Class 1 |
Wavelength based on application |
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Light Tower |
Indicates glovebox or process status |
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Tool Interchange |
Floor access, front loading |
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Safety |
Light curtain, interlocks |
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Specifications are subject to change without notice.