- 完全電腦化操作
- 歷史圖形與實時圖形顯示
- 所有爐具和預燃室均配備獨立的真空抽氣系統
- 集成式濕度、氧、氬與氦監控
- 可調整的模塊化設計
Miyachi Unitek研製的AX5000空氣隔離設備堅固小巧，並使用WindowsR軟件控制。 這種隔離設備安全、方便、易用，適合於電子元件封裝製造業中的氣密密封裝應用。
AX5000採用304型內部拋光不銹鋼製造，其牢固的管形桁架可為自動化與活動要求提供可靠支撐。 該空氣隔離設備採用易於移除的安全玻璃窗，並配有含內置扶手與丁基橡膠手套的手套孔。
AX5000符合NASA-STD-3000人體工學標準，便於各種體型的作業人員舒適地進行操作。
GLOVEBOX SPECIFICATIONS AND OPTIONS :
|
Features
|
|
|
Antechambers and Ovens |
|
|
Configuration Options |
End, front, rear loading |
|
Heating |
Wall heating or heated shelves |
|
Temperature |
0-200° C std., higher available |
|
Vacuum Pumps |
Rotary Vane, Dry, or Turbo Pumps |
|
Analysis and Monitoring Capabilities |
|
|
Oxygen Detection Range |
0-1000 PPM or % |
|
Moisture Detection Range |
0-150 PPM or ° C dewpoint |
|
Helium Monitoring |
% |
|
Argon Monitoring |
% |
|
Utilities |
|
|
Electrical |
5-wire, 208VAC, 3-phase, 30 amps, 50/60 Hz OR |
|
Inputs |
|
|
Environmental gas |
60psi (415kPa) |
|
Automatic Door gas |
80psi (550kPa) |
|
Chilled Water Needed for oven flange cooling Not required with optional water re-circulator |
|
|
Features
|
|
|
Gas Purification |
|
|
Single Column |
30 CFM (51 m3/hr) |
|
Dual Column |
|
|
Automatic Dual Column |
|
|
Gas Mixers |
|
|
Manual Set Mixers |
Two and three gas versions |
|
Automatic Closed Loop Mixer |
Two gases |
|
Others |
|
|
Soot Removal Systems |
30 CFM (51 m3/hr) or 100 CFM (170 m3/hr) |
|
CDRH Class 1 |
Wavelength based on application |
|
Light Tower |
Indicates glovebox or process status |
|
Tool Interchange |
Floor access, front loading |
|
Safety |
Light curtain, interlocks |
|
|
|
Specifications are subject to change without notice.